The Chroma 7201 was designed to measure wafer lengths, widths, diagonal, orthogonal and chamfer size and angle, it is also capable to detect surface stains. User friendly software and GUI enable versatile parameter settings and result, it also provides defect display and storage function for further analysis or potential MES/CIM integration.
- Capable to be integrated to any wafer sorters
- Flexible algorithms editor for mono-crystalline,multi-crystalline and quasi-crystalline wafers, and works for both 5" and 6"
- Multiple interface to communicate with different equipment or manufacturing execution system(MES)
- Ready for diamond-saw wafers inspection
- Self-monitor and calibration system
